Iterative Feedforward Tuning Approach and Experimental Verification for Nano-precision Motion Systems
نویسندگان
چکیده
Feedforward control can significantly improve the performance of industrial motion systems through compensation of the servo error induced by the reference signal. Recently, new feedforward tuning algorithms have been proposed that exploit measured data from previous tasks and a suitable feedforward parametrization to attain high servo performance. The aim of this paper is to formulate a design procedure for motion feedforward tuning. Experimental results on an industrial motion system illustrate the improvement in servo performance obtained by means of the proposed tuning procedure.
منابع مشابه
Introduction to the special issue on control of high-precision motion systems
Driven by increasing societal, economic, and technological pressures , high-precision motion systems must achieve ever increasing speed and accuracy requirements. Motion systems are used in many different application areas, including hard disk drives (HDDs) in consumer electronics, wafer steppers and scanners in nano-scale manufacturing machines, electron and atomic force microscopes for nano-s...
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